Tokyo University of Science Team Uses Ionic Liquid to Assist Dry Etching of Metal-Organic Frameworks, Published in Communications Materials
Researchers led by Assistant Professor Yumeng Zheng and Professor Kentaro Kinoshita in the Department of Applied Physics at Tokyo University of Science in Japan have developed a method to process metal-organic frameworks. The team filled the framework pores with an ionic liquid to reduce damage during dry etching, and the study was published in Communications Materials.
Metal-organic frameworks are porous materials studied for uses including electronic devices, but their fragile structures make shaping difficult. The ionic liquid filling is intended to support the pore structure during room-temperature dry etching.
The paper is titled Ionic-liquid-assisted room-temperature dry etching of metal-organic frameworks, with digital object identifier 10.1038/s43246-026-01396-3. Team members included Koki Egawa.
来源： https://phys.org/news/2026-11-metalorganic-frameworks-easier-electronic-devices.html
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Published by GSM · USA (original Chinese edition)
Photo: Wikipedia/Wikimedia Commons 词条主图：Ionic liquid piston compressor
